Chemical supply unit

HTC, VTC
Quartz parts stockers
Wafer cleaning processor
Chemical supply unit
Spin dryer
Megasonic cleaning system

This is "Chemical supply unit" is independently installed from main cleaning system to minimize footprint.
This unit enables to stock chemical safely, and supply chemicals automatically to the device which need it supply safely.

Features

● Corresponding to supply various chemicals (HF, HNO3, NH3, etc.)

● Possible to concentration, temperature

● Assuring filtered chemical supply

● Various sensors are available for safety

● Responding to customers' special requests (footprint, supply way, dryer selection, etc.)