Semiconductor

HTC, VTC (fully automated quartz tube/parts cleaner)
Quartz Tube
 
We have been dedicated in designing and producing fully automated quartz tube/parts cleaner called HTC (Horizontal Tube Cleaner) or VTC (Vertical Tube Cleaner) for diffusion, oxidation and CVD prosesses.
We offer "HTC", which has high cleaning capacity by immersing tubes in chemicals.
"VTC" which realizes less chemical consumption with spraying chemicals and recirculated use of chemicals. "VTC" is an optimum solution for the cleaning of complicated gas inlet configuration.
 

Features of "HTC"

● Correspond to process up to 300mm furnace chambers and various parts

● Possible to process result uniformity by rotating tube in immersion bath

● Process bath is made from PVDF

● Automatic environment isolation with shutter for safety

● Flexible designing of basket for various small parts

● Responding to customers' special requests (footprint, the number of process bath, chemical supply/collect unit, etc.)
 

Features of "VTC"

● Correspond to process up to 300mm furnace chambers and various parts

● Possible to process various shape tube

● Possible to process uniformity by rotating turntable and shower spraying

● Drastically reducing consumption of chemicals

● Double doors and various interlocks are available for safety

● Possible to process tube and parts simultaneously with combination of parts clean bath

● Responding to customers' special requests (footprint, the number of process chamber, chemical supply/collect unit, etc.)