Semiconductor Division
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Semiconductor Division offers "fully automated quartz tube/parts cleaner" which used in diffusion/CVD processes, "Wafer cleaning processor", "Megasonic cleaning system", "Chemical supply unit", etc.
Our goal is to provide our equipments which are optimized exactly for the requirements at the production field and the customers' requests.
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Our products
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HTC/VTC (fully automated quartz tube/parts cleaner)
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● Fully automated quartz tube/parts cleaner for diffusion/CVD process
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Quartz parts stockers
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● To dry and stock with clean air filters and heaters
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Wafer cleaning processor (Automatic/Manual)
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● Automatic/Manual clean process (Load→Chemical→Flush→Dry→Unload)
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Chemical supply unit
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● Automatically measuring chemicals, mixing and supplying
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Spin dryer
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● The Spin dryer is used for drying after wafer cleaning process
● Drying by centrifugal force and air flow caused spinning
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Megasonic cleaning system
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● This device is suitable for precious cleaning for fine patterned wafer
● Impremented in wet cleaning system
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